최근 업데이트 : 2019년 02월
No Size Division Maker Model EQP ID Vintage Remark
1 ASML AT_850C SET180001E 2004
2 ASML XT_1700Fi SET180002E 2007
3 CANON FPA6000 ES6A SET180003E 2007
4 DNS SU-3100 SET180004E 2011
5 DNS SU-3100 SET180005E 2007
6 DNS FC3100 SET180006E 2007
7 TEL ACT-12 SET180009E 2003
8 HITACHI S-9380II SET180007E 2007
9 HITACHI S-9380II SET180008E 2006
10 NOVELLUS VECTOR_EXPRESS SET180010E 2007
11 NOVELLUS VECTOR_EXPRESS SET180011E 2007