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SEMICONDUCTOR EQUIPMENT MANUFACTURING

HITACHI S-9380II
Wafer size 300mm
PRO_PROCESS 300mm
Serial No. 2194-03
Vintage 2007
SET ID SET180007E
Price 개별 제품 담당자 문의
Description

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Description Wafer Size : 300mm / Load port 2ea
Power : Single phase 200/208/230V AC (50/60 Hz), 6kVA
Robot Type : Tazmo Robot
Work station : Modle (HF-W2000) / O/S (HPUX) / Software VER (26.30)