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PLASMA CHAMBER	적용공정	BACKBONE	CHAMBER수	PROESS	ESC	비고
MAXIS200	TSV CTCH DTI ETCH SIE ETCH	NeoGENⅡ NeoGEN NeoS	3 1 1	CYCLE OR NON-CYCLE	DUAL TEMP	METALIC CONTAMINAT ION FREE
MAXIS300	TSV CTCH DTI Sic ETCH	NeoGENⅢ	3	CYCLE OR NON-CYCLE	DUAL TEMP	METALIC CONTAMINAT ION FREE