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SEMICONDUCTOR EQUIPMENT MANUFACTURING

DNS SU-3100
Wafer size 300mm
PRO_PROCESS 300mm
Serial No. 530900028A
Vintage 2007
SET ID SET180005E
Price 개별 제품 담당자 문의
Description

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Description Wafer Size 300mm / Loadport 4ea / Chamber 8ea
Robot Type : Kawasaki Robot, SC120SCC00001
Main Power : 220V / 3Phase / Full Load 36kVA / 100A