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SEMICONDUCTOR EQUIPMENT MANUFACTURING

TEL ACT-12
Wafer size 300mm
PRO_PROCESS 300mm
Serial No. MD-E230698
Vintage 2003
SET ID SET180009E
Price 개별 제품 담당자 문의
Description

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Description 2Block / Coater Unit (2-1, 2-2), BCT Unit (2-3, 2-4), Developer Unit (3-1, 3-2, 3-3, 3-4)
Main Controller : #3 Controller (HDD X)
Power Rating : AC 208V, 3-Phase for System
Carrier Robot : NSK (JS1003FN506, TEL Standard)