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RF Device

RF Device

实现物联网（IOT）、自动驾驶车辆和人工智能（AI)等所必需的超高速RF元件的开发和商业化正在进行中。RF设备仅由特定少数企业开发和制造，是韩国先进技术的关键配件。
Gigalane拥有具备优秀工艺特性的Dry etcher，可进行特殊材料的精密加工，并拥有可提供出色的频率响应特性的先进设备。

Related Products
  • - 2inch-8inch, Nano to Micro Pattern
  • - LED, Display, Other Electric Devices
  • - Flexible Resin Mold
  • - Coater in-line or optional
Performance
  • - 20㎚ Pattern Resolution
  • - Use of Repeatable Soft Mold
  • - Lower CoC & CoO
  • - Very small foot print against Photo Litho Equipments
  • - Comet-free
Applied Device and Process Capability

  • 图片出处: New Electronics SAW Filter(Surface Acoustic Wave) - 将专用于Piezoelectric Substrate(LT， LN)的ESC技术 - 优秀的Metal Pattern Printability - LT、 LN晶圆上KrF/ArF stepper分辨率(50 ~ 300nm) 的高精密 IDT pattern etch resist通过 imprint 工艺全面在晶圆上体现。

  • 图片出处: New Electronics BAW-SMR(Bulk Acoustic Wave-Surface Mounted Resonator) 多样的 Piezoelectric Film Etching Capability

  • 图片出处: New Electronics FBAR(Film Bulk Acoustic Resonator) - 多样的 Piezoelectric Film Etching Capability - Air Cavity Etching Capability

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